JPH049031Y2 - - Google Patents

Info

Publication number
JPH049031Y2
JPH049031Y2 JP1984087091U JP8709184U JPH049031Y2 JP H049031 Y2 JPH049031 Y2 JP H049031Y2 JP 1984087091 U JP1984087091 U JP 1984087091U JP 8709184 U JP8709184 U JP 8709184U JP H049031 Y2 JPH049031 Y2 JP H049031Y2
Authority
JP
Japan
Prior art keywords
substrate
support
support rods
spray device
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984087091U
Other languages
English (en)
Japanese (ja)
Other versions
JPS614772U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8709184U priority Critical patent/JPS614772U/ja
Publication of JPS614772U publication Critical patent/JPS614772U/ja
Application granted granted Critical
Publication of JPH049031Y2 publication Critical patent/JPH049031Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP8709184U 1984-06-12 1984-06-12 スプレ−装置 Granted JPS614772U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8709184U JPS614772U (ja) 1984-06-12 1984-06-12 スプレ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8709184U JPS614772U (ja) 1984-06-12 1984-06-12 スプレ−装置

Publications (2)

Publication Number Publication Date
JPS614772U JPS614772U (ja) 1986-01-13
JPH049031Y2 true JPH049031Y2 (en]) 1992-03-06

Family

ID=30638992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8709184U Granted JPS614772U (ja) 1984-06-12 1984-06-12 スプレ−装置

Country Status (1)

Country Link
JP (1) JPS614772U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325400Y2 (en]) * 1986-06-30 1991-06-03

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313244Y2 (en]) * 1973-08-16 1978-04-10
JPS54167678U (en]) * 1978-05-16 1979-11-26

Also Published As

Publication number Publication date
JPS614772U (ja) 1986-01-13

Similar Documents

Publication Publication Date Title
JP4189141B2 (ja) 基板処理装置及びこれを用いた基板処理方法
JPH049031Y2 (en])
JPS5851412B2 (ja) 半導体装置の微細加工方法
JP3956245B2 (ja) フォトマスク装置
JP2001033634A (ja) スタンパの製造方法
KR100366615B1 (ko) 케미컬 공급노즐을 구비한 스피너장비, 이를 이용한 패턴형성방법 및 식각 방법
JPH08305002A (ja) フォトマスクブランクスの製造方法
JPH0325400Y2 (en])
JP3068398B2 (ja) レチクルの製造方法およびその製造装置
JPH0128676Y2 (en])
US4999277A (en) Production of precision patterns on curved surfaces
JPH0220823Y2 (en])
JPH1197327A (ja) 露光装置のマスク取付機構
JPH09306822A (ja) プラズマエチング方法及びフォトマスクの製造方法
JPS61188934A (ja) レジスト除去装置
JP2002333702A (ja) プラズマエッチング方法及びフォトマスクの製造方法
JPS6310162A (ja) フオトマスク
JPH03191348A (ja) 縮小投影露光用レティクル
JPS634216Y2 (en])
JPS59104650A (ja) レジスト膜形成装置
JPH042754Y2 (en])
JPH07142307A (ja) 薬液処理ステージ
JPH09213609A (ja) 半導体装置の製造方法
JPS61262741A (ja) マスク基板
JPH02199401A (ja) 回折格子の作製方法